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Glossary entry

German term or phrase:

Prozesstopf

English translation:

processing (etching) chamber

Added to glossary by John Jory
May 10, 2005 07:52
19 yrs ago
2 viewers *
German term

Prozesstopf

German to English Tech/Engineering Mechanics / Mech Engineering
Der *Prozesstopf* soll über 4 Sprühpositionen (Kammern) verfügen.

Hier geht es um die Installation eines Geräts, welches der vollautomatischen, naßchemischen Rückseitenätzung von Si-Wafern dient. Hilfe! Google gibt nix her.
Proposed translations (English)
3 +4 processing chamber

Discussion

John Jory May 10, 2005:
Wie w�r's mit etching compartment/chamber (danach hatte ich zuerst gegoogelt).
Also: der/das processing chamber enth�lt 4 etching compartments oder so.
Non-ProZ.com May 10, 2005:
Thanks John, but "processing chamber" is mentioned as a separate part, so what do I do now? Next sentence is : Die Proze�kammer mu� aus einem gegen�ber den Proze�chemikalien inerten Material bestehen.

Proposed translations

+4
15 mins
Selected

processing chamber

"A side-selectable wet processing chamber shows promise as a method for removing wafer backside contamination and eliminating copper films on the bevel and edge of the wafer."
Reference:

http://www.micromagazine.com/archive/00/10/simpson.html

Peer comment(s):
agree Alan Johnson : Wow, sounds good.
21 mins
agree Ken Cox : or process chamber, but the context you quote is certainly impeccable
56 mins
agree Wolf Brosius (X) : Hi John, spot on!
7 hrs
agree Stephen Sadie : C'est ca
23 hrs
Something went wrong...
4 KudoZ points awarded for this answer. Comment: "Thanks John, much appreciated!"
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