Glossary entry

Russian term or phrase:

разрешение

English translation:

(in a lithography context) resolution

Added to glossary by Jack Doughty
Dec 9, 2005 20:56
18 yrs ago
2 viewers *
Russian term

разрешение

Russian to English Tech/Engineering Energy / Power Generation short-wave radiation from gas discharge plasma
What does разрешение mean in this context? It is from a patent entitled "Device and method for producing short-wave radiation from gas-discharge plasma".

За счет этого достигается новое качество источника излучения, а именно, возможность получения средней мощности коротковолного излучения, в частности на lambda=13,5 нм, необходимой для индустриального применения в литографии с разрешением не больше 50 нм.

("lambda" & "не больше" - don't know how to insert Greek letters or mathematical symbols into this window).
Proposed translations (English)
3 +9 resolution?
5 In support of Responder

Discussion

Jack Doughty (asker) Dec 9, 2005:
I thought of "resolution" as a possibility ...but I don't know enough about lithography to be sure whether is would be right in this context.

Proposed translations

+9
1 min
Russian term (edited): ���������
Selected

resolution?

IMO.
Peer comment(s):

agree Sergei_A
2 mins
Thank you!
agree Nik-On/Off
5 mins
Thank you!
agree Sabina Metcalf
9 mins
Thank you!
agree Kirill Semenov
16 mins
Thank you!
agree Peter Shortall : Not my specialist subject either but see this link: http://www.soft-uv-nanoimprint.com/souvenir/Souv_intro.html, which appears to confirm it.
23 mins
Thank you!
agree Dmytro Palets : Definitely so.
31 mins
Thank you!
agree Giacomo Camaiora (X)
1 hr
agree Jack slep : Yeah man, right on!!!
2 hrs
agree Sergei Tumanov
3 hrs
Something went wrong...
4 KudoZ points awarded for this answer. Comment: "Thank you. This confirms my own tentative opinion. Thanks also to Jack Slep for the further backing for this answer."
2 hrs

In support of Responder

IBM Journal of Research and Development: TCAD development for ...
Full text of the article, 'TCAD development for lithography resolution enhancement'
from IBM Journal of Research and Development, a publication in the field ...
www.findarticles.com/p/articles/mi_qa3751/is_200109/ai_n899... - 29k - Cached - Similar pages - Filter

TCAD development for lithography resolution enhancement
IBM Journal of Research and Development issue 45-5, Advanced Semiconductor
Lithography. - TCAD development for lithography resolution enhancement - Feature ...
www.research.ibm.com/journal/rd/455/liebmann.html - 74k - Cached - Similar pages - Filter

[PDF] TCAD development for lithography resolution enhancement
File Format: PDF/Adobe Acrobat - View as HTML
a brief discourse on lithography resolution and resolution ... a unique role in
advancing practical lithography resolution ...
www.research.ibm.com/journal/rd/455/liebmann.pdf -
Something went wrong...
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