Glossary entry (derived from question below)
Russian term or phrase:
разрешение
English translation:
(in a lithography context) resolution
Added to glossary by
Jack Doughty
Dec 9, 2005 20:56
18 yrs ago
2 viewers *
Russian term
разрешение
Russian to English
Tech/Engineering
Energy / Power Generation
short-wave radiation from gas discharge plasma
What does разрешение mean in this context? It is from a patent entitled "Device and method for producing short-wave radiation from gas-discharge plasma".
За счет этого достигается новое качество источника излучения, а именно, возможность получения средней мощности коротковолного излучения, в частности на lambda=13,5 нм, необходимой для индустриального применения в литографии с разрешением не больше 50 нм.
("lambda" & "не больше" - don't know how to insert Greek letters or mathematical symbols into this window).
За счет этого достигается новое качество источника излучения, а именно, возможность получения средней мощности коротковолного излучения, в частности на lambda=13,5 нм, необходимой для индустриального применения в литографии с разрешением не больше 50 нм.
("lambda" & "не больше" - don't know how to insert Greek letters or mathematical symbols into this window).
Proposed translations
(English)
3 +9 | resolution? | responder |
5 | In support of Responder | Jack slep |
Proposed translations
+9
1 min
Russian term (edited):
���������
Selected
resolution?
IMO.
Peer comment(s):
agree |
Sergei_A
2 mins
|
Thank you!
|
|
agree |
Nik-On/Off
5 mins
|
Thank you!
|
|
agree |
Sabina Metcalf
9 mins
|
Thank you!
|
|
agree |
Kirill Semenov
16 mins
|
Thank you!
|
|
agree |
Peter Shortall
: Not my specialist subject either but see this link: http://www.soft-uv-nanoimprint.com/souvenir/Souv_intro.html, which appears to confirm it.
23 mins
|
Thank you!
|
|
agree |
Dmytro Palets
: Definitely so.
31 mins
|
Thank you!
|
|
agree |
Giacomo Camaiora (X)
1 hr
|
agree |
Jack slep
: Yeah man, right on!!!
2 hrs
|
agree |
Sergei Tumanov
3 hrs
|
4 KudoZ points awarded for this answer.
Comment: "Thank you. This confirms my own tentative opinion. Thanks also to Jack Slep for the further backing for this answer."
2 hrs
In support of Responder
IBM Journal of Research and Development: TCAD development for ...
Full text of the article, 'TCAD development for lithography resolution enhancement'
from IBM Journal of Research and Development, a publication in the field ...
www.findarticles.com/p/articles/mi_qa3751/is_200109/ai_n899... - 29k - Cached - Similar pages - Filter
TCAD development for lithography resolution enhancement
IBM Journal of Research and Development issue 45-5, Advanced Semiconductor
Lithography. - TCAD development for lithography resolution enhancement - Feature ...
www.research.ibm.com/journal/rd/455/liebmann.html - 74k - Cached - Similar pages - Filter
[PDF] TCAD development for lithography resolution enhancement
File Format: PDF/Adobe Acrobat - View as HTML
a brief discourse on lithography resolution and resolution ... a unique role in
advancing practical lithography resolution ...
www.research.ibm.com/journal/rd/455/liebmann.pdf -
Full text of the article, 'TCAD development for lithography resolution enhancement'
from IBM Journal of Research and Development, a publication in the field ...
www.findarticles.com/p/articles/mi_qa3751/is_200109/ai_n899... - 29k - Cached - Similar pages - Filter
TCAD development for lithography resolution enhancement
IBM Journal of Research and Development issue 45-5, Advanced Semiconductor
Lithography. - TCAD development for lithography resolution enhancement - Feature ...
www.research.ibm.com/journal/rd/455/liebmann.html - 74k - Cached - Similar pages - Filter
[PDF] TCAD development for lithography resolution enhancement
File Format: PDF/Adobe Acrobat - View as HTML
a brief discourse on lithography resolution and resolution ... a unique role in
advancing practical lithography resolution ...
www.research.ibm.com/journal/rd/455/liebmann.pdf -
Discussion